Carbon PE-CVD

HIPPA is a unique CNMS-constructed tool for the plasma-enhance chemical vapor growth of carbon nanostructures over large areas. This technique finds applications in a number of projects for creating biological interfaces, detectors, and electrochemically active nanostructures.

Carbon nanospikes are a unique material available only at CNMS. These heavily textured graphene spikes can be conformally coated over most conducting surfaces and exhibit extraordinary local electric fields under electrochemical conditions.

Vertically aligned carbon fibers provide an electrically conductive interface for nano-biological applications.

Specifications

Accommodates 4-inch wafer or substrate
Heated Platen up to 700 °C,
Gases are C₂H₂ and NH₃,
Vacuum range 4 torr to 50 torr,
Plasma .25A to 4A.

Recent Publications

CO₂ Electroreduction using carbon nanospike/copper electrode

Electrochemical reduction of N₂ to NH₃

Contacts

Dale K Hensley