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Carving Films with Scanning Transmission Electron Microscopy

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Invention Reference Number

202205255

To realize quantum computing and quantum sensing applications with topological materials, we must learn to shape these materials into device structures and characterize the resulting edge structure with near atomic precision. Unfortunately, chalcogenide topological materials are not amenable to traditional nanofabrication techniques and we must find new ways to shape these materials or make them compatible with existing nanofabrication techniques. Researchers at ORNL have developed a method for “carving” topological materials using the scanning transmission electron microscopy that allows fabricating device structures with atomic precision out of this new generation of quantum topological materials. This technique enables the creation of new devices for quantum computing and sensing applications.

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To learn more about this technology, email partnerships@ornl.gov or call 865-574-1051.