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Fabrication of Low Cost Surface Acoustic Wave Sensors Using Direct Printing by Aerosol Inkjet

by Marissa E Morales Rodriguez, Pooran C Joshi, James R Humphries Iii, Peter L Fuhr, Timothy J Mcintyre
Publication Type
Journal
Journal Name
IEEE Access
Publication Date
Page Numbers
20907 to 20915
Volume
6

Advancements in additive manufacturing techniques, printed electronics, and nanomaterials have made it possible for the cost-effective fabrication of sensors and systems. Low-cost sensors for continuous and real time monitoring of physical and chemical parameters will directly impact the energy-efficiency, safety, and manufacturing challenges of diverse technology sectors. In this paper, we present the design, printing, and characterization of a two-port surface acoustic wave (SAW) integrated on LiNbO3 substrate. The aerosol jet printer was used for direct-writing of interdigitated transducers for SAW devices with center frequency in the range of 40-87 MHz. The linear response of a temperature sensor based on the SAW design shows promise for direct-writing of environmental sensors on low-temperature substrates.