Publication Type
Journal
Journal Name
Microscopy and Microanalysis
Publication Date
Page Numbers
441 to 453
Volume
15
Issue
5
Abstract
The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from a specialist project, custom built at a small number of sites to a common instrument in many modern laboratories. Here we describe some initial results illustrating the two- and three- dimensional performance of an aberration corrected STEM with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We demonstrate a resolution of 0.63 � and detection of single dopant atoms with three-dimensional sensitivity.
