Abstract
PZT stacks that had an inter-digital internal electrode configuration and consisted of a specific number of multilayer actuators were tested to more than 108 cycles by using a 100-Hz semi-bipolar sine wave with a field range of +4.5/-0.9 kV/mm and a 20-MPa mechanical preload. Significant reductions in mechanical strain and piezoelectric coefficients were observed during the fatigue cycling, depending on the measuring condition. Extensive surface discharges and arcs were also observed. These surface events as well as related dielectric breakdown resulted in the erosion of external electrode and outcrop of internal electrode, and that partially accounts for the reduction observed above. The data obtained in this study demonstrated the feasibility of using a semi-bipolar mode to drive a PZT stack with a designed mechanical preload applied and illustrated the potential fatigue of stack~{!/~}s performance during its service.