Publication Type
Journal
Journal Name
Microscopy and Microanalysis
Publication Date
Page Numbers
699 to 704
Volume
18
Issue
4
Abstract
The resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration-correctors are then primarily limited by higher-order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.
