Thin Film XRD

The PANalytical X’Pert Pro MRD is a multipurpose x-ray diffractometer that is capable of high- and low-resolution measurements for thin-film characterization using techniques such as x-ray reflectivity, reciprocal space mapping, rocking curve analysis, theta-2theta scans, and texture analysis.   

Features

• 1.8kW Cu Kα source
• High flux hybrid monochromator
• Automatic beam attenuator
• Receiver slits and Ge analyzer
• Sealed Xe proportional counter
• 127 mm diam stage

±50 mm translation in X and Y

Sample thickness limited to ≤9 mm

Multiple sample capable

• Vacuum option
• Open horizontal goniometer
• Scriptable measurement sequences