Methods for Detection and Quantification of Conductance and Dielectric Permittivity

A device/test structure is described, which enables ac readout of nanoscale dielectric and conduction inhomogeneities and allows overcoming measurement parasitics in nanoscale characterization of dielectric properties. A measurements procedure is described based on the device/test structure, which minimizes the effect of the capacitance of the probe cone/shaft on the measurement result

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