August 2018

Conference Paper

Towards Atomic-Scale Fabrication in Silicon

By:
Hudak, Bethany M; Jesse, Stephen ; Song, Jiaming ; Borisevich, Albina Y; Snijders, Paul C; Kalinin, Sergei V; Lupini, Andrew R
Journal Name:
Microscopy and Microanalysis
Page Number:
158-159
Volume:
24
Issue Number:
S1
Publication Date:
August 2018
Conference Name:
Microscopy and Microanalysis 2018
Conference Location:
Baltimore, Maryland, United States of America
Conference Sponsor:
Microscopy Society of America
View DOI Listing:
https://doi.org/10.1017/S1431927618001289