June 2008

Journal

THERMODYNAMIC ANALYSIS AND GROWTH OF ZrO2 BY CHLORIDE CVD

By:
Varanasi, Venu G; Besmann, Theodore M; Payzant, Edward A; Anderson, Timothy
Journal Name:
Thin Solid Films
Page Number:
6133-6139
Volume:
516
Issue Number:
18
Publication Date:
June 2008
View DOI Listing:
https://doi.org/10.1016/j.tsf.2007.11.020

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