Single-mode porous silicon waveguide interferometers with unity confinement factors for ultra-sensitive surface adlayer sensing

Abstract

Guided wave-optics has emerged as a promising platform for label free biosensing. However, device sensitivity toward surface-bound small molecules is directly limited by the evanescent interaction and low confinement factor with the active sensing region. Here, we report a mesoporous silicon waveguide design and inverse fabrication technique that resolves the evanescent field interaction limitation while achieving maximal transverse confinement factors and preserving single-mode operation. The waveguide sensors are characterized in a Fabry-Perot interferometer configuration and the ultra-high sensitivity to small molecule adlayers is demonstrated. We also identify dispersion to be a promising degree of freedom for exceeding the sensitivity limits predicted by the conventional non-dispersive effective medium theory.