November 2005

Journal

Segregation and Enhanced Diffusion of Nitrogen in Silicon Induced by Low Energy Ion Bombardment

By:
Stoddard, Nathan; Duscher, Gerd J; Karoui, A.; Stevie, F.; Rozgonyi, G.
Journal Name:
Journal of Applied Physics
Page Number:
083534
Volume:
97
Issue Number:
8
Publication Date:
November 2005