August 2006

Journal

Scanning Transmission Electron Microscopy Investigations of Interfacial Layers in HfO2 Gate Stacks

By:
Agustin, Melody; Bersuker, Gennadi; Foran, Brendan; Boatner, Lynn A; Stemmer, Susanne
Journal Name:
Journal of Applied Physics
Page Number:
024103
Volume:
100
Issue Number:
2
Publication Date:
August 2006