September 2012

Journal

Plastic deformation in profile-coated elliptical KB mirrors

By:
Liu, Chian; Conley, R.; Qian, J; Kewish, C.; Liu, W.; Assoufid, Lahsen; Macrander, Albert; Ice, Gene E; Tischler, Jonathan
Journal Name:
ISRN Optics
Page Number:
151092
Volume:
2012
Issue Number:
N/A
Publication Date:
September 2012

Abstract

Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Recent studies of bare Si, Au-, and Pt-coated KB mirrors under prolonged synchrotron x-ray radiation and low-temperature vacuum annealing will be discussed in terms of film-stress relaxation and Si plastic deformation.