October 2005

Journal

Nano-Scale Analysis of Precipitates in Nitrogen-Doped Czochralski SIlicon

By:
Rozgonyi, G.; Karoui, A.; Kvit, A.; Duscher, Gerd J
Journal Name:
Microelectronics Engineering
Page Number:
305-313
Volume:
66
Issue Number:
2
Publication Date:
October 2005