October 2006

Conference Paper

Indentation Rate Effect on Pop-out in Silicon Studied by Cross-sectional TEM

By:
Wen, Songqing ; Bentley, James ; Jang, Jae-Il ; Pharr, George M
Page Number:
1468
Book Title:
Proceedings of the sixteenth international microscopy congress
Publication Date:
October 2006
Conference Name:
The 16th International Microscopy Conference
Conference Location:
Sapporo, Japan
Conference Sponsor:
Japanese Society of Microscopy, International Federation of Societies for Microscopy