April 2014

Journal

Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

By:
Arnold, Georg; Timilsina, R; Fowlkes, Jason D; Orthacker, Angelina; Kothleitner, Gerald; Rack, P.; Plank, Harald
Journal Name:
ACS Applied Materials & Interfaces
Page Number:
7380-7387
Volume:
6
Issue Number:
10
Publication Date:
April 2014