September 2006

Conference Paper

Direct to Digital Holography for Semiconductor Wafer Defect Detection and Review

By:
Thomas, C. E.; Bahm, Tracy; Baylor, Larry R; Bingham, Philip; Burns, Steven; Chidley, Matthew ; Dai, Xiaolong; Delahanty, Robert; Doti, Christopher; El-Khashab, Ayman; Fisher, Robert; Gilbert, Judd; Cui, Hongtao ; Goddard Jr, James S; Hanson, Gregory R; Hickson, Joel; Hunt, Martin; Hylton, Kathy W; John, George; Jones, Michael; McDonald, Kenneth; Mayo, Michael; McMackin, Ian; Patek, David R; Price, John; Rasmussen, David A; Schaefer, Louis; Scheidt, Thomas; Schulze, Mark; Schumaker, Philip; Shen, Bichuan; Smith, Randall; Su, Allen; Tobin Jr, Kenneth W; Usry, William; Voelkl, Edgar; Weber, Karsten; Jones, Paul; Owen, Robert
Page Number:
180-194
Volume:
4692
Book Title:
Proceedings of SPIE Vol. #4692
Publication Date:
September 2006
Conference Name:
Design, Process, Inegration, and Characterization for Microelectronics, 2002
Conference Location:
Santa Clara, California, United States of America
Conference Sponsor:
SPIE