Chemical Sputtering of Deuterated Carbon Surfaces at Various Surface Temperatures

Abstract

The chemical sputtering of deuterated amorphous carbon (a-C:D) surfaces irradiated by 1 – 50 eV deuterium atoms at surface temperatures between 300 – 1000 K was studied using classical molecular dynamics. A quasi-stationary state was reached by cumulative bombardment for each energy and temperature. Results were compared with available experimental data and previous modeling results, and the applicability of molecular dynamics for thermally generated processes was discussed. An attempt is made to correct the absence of the thermally stimulated desorption/degassing form the MD simulations, which evolve at the longer time scales.