Improvements in 3D nanofabrication using electron beam induced deposition lead to the mechanical stiffness that is needed to form a resonator structure, which then can be used as nanoprinted sensor.
G. Arnold, R. Winkler, M. Stermitz, A. Orthacker, J-H. Noh, J. D. Fowlkes, G. Kothleitner, M. Huth, P. D. Rack, and H. Plank, “Tunable 3D Nanoresonators for Gas-Sensing Applications,” Advanced Functional Materials (2018). DOI: 10.1002/adfm.201707387