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SEM with Cathodoluminescence

CL-SEM in CNMS lab J-147
CL-SEM in J-147 at the Center for Nanophase Materials Sciences

The SEM-cathodoluminescence (CL) microscope is based on an FEI Quattro environmental SEM with a Delmic Sparc cathodoluminescence module. Different attachments can be used to enable temperature, wavelength, polarization, position, angle, and time-resolved CL microscopy. Laser annealing, electron-beam patterning and electron-beam induced deposition with Au precursors can be used for in situ material processing. Single photon detection with collocated superconducting nanowire detectors enable spatially resolved photon bunching and antibunching measurements. Ultrafast beam-blanking and femtosecond laser pumping of the electron gun enable ultrafast CL microscopies.


  • Landing energy tunable 20V-30keV with beam deceleration mode
  • 0.8 nm spatial resolution at 30keV with STEM detector
  • Parabolic mirror with numerical aperture of 0.97 for CL collection
  • 200 ps timing resolution with ultrafast beam blanking.
  • Sub-ps electron-pulses with fs-laser driven FEG
  • Time- and energy-resolved correlative CL and PL for fast electronic dynamics
  • Laser/electron pump probe spectroscopy for ultrafast dynamics 
  • Temperature >8K
  • In situ electron beam patterning
  • In situ laser annealing
  • In situ electron beam induced deposition with Au precursor
  • Superconducting nanowire single photon detectors for quantum emitter characterization optimized for 400-1000 nm
  • Spectrometer optimized for 350-1000 nm
  • PMT optimized for 185-870 nm