Fast, true color, high resolution 3D surface profiling of polymer film, composites, nanofabricated lithographed features, 2D devices.
Specifications/Capabilities/Extras
- Keyence VK9510 violet laser
- Objectives: 10x, 20x, 50x, 150x
- 10 nm resolution
- Statistics on dimensions of surface features
- Scan areas up to 50 x 50 mm
- Accurately measure steep slopes and angled surfaces
