Highly automated pulsed laser deposition (one conventional and one codeposition chamber) and robotic sample transfer are combined with in situ diagnostics (RHEED and Ion Probe) and post-growth analysis (XPS and Raman/PL) to implement a machine learning based workflow for materials synthesis, discovery, and algorithm development.
Features
- Laser source: 248 nm excimer laser, 1 J/pulse, 1 Hz to 20 Hz repetition rate
- Number of targets: four in each chamber with computer-controlled target sequencing
- Spot size at target: adjustable from sub millimeter to a few millimeters
- Fluence at target: adjustable from sub 1 J/cm2 up to 3 J/cm2
- Deposition rate: adjustable from sub angstroms to almost 1 angstrom per laser shot
- In situ diagnostics: high pressure RHEED and Ion Probe
- Base pressure: 2x10-7 torr
- Ambient: currently argon or oxygen, pressured controlled to multiple millitorrs up to 100s of millitorrs
- Heating: Laser up to 1000°C
- Substrate size: 5 mm x 5 mm
- 16 sample garage
- Target-to-substrate: fixed at 50 mm
- Witec RISE for post-growth optical characterization
- Scienta Omicron XRS Lab for post-growth compositional analysis
- Python-powered workflow
