November 2002

Conference Paper

Depth Profiling of SiC Lattice Damage Using Micro-Raman Spectroscopy

By:
Muntele, Iulia; Ila, Daryush; Muntele, C.; Poker, David B; Hensley, Dale K
Page Number:
209
Volume:
692
Book Title:
Progress in Semiconductor Materials for Optoelectronic Applications
Publication Date:
November 2002
Conference Name:
2001 MRS Fall Meeting
Conference Location:
Boston, Massachusetts, United States of America
Conference Sponsor:
Materials Research Society
Conference Dates:
November 26, 2001 - November 29, 2001