May 2011

Conference Paper

Molecular Size Effect in the Chemical Sputtering of a-C:H Thin Films by Low Energy H+, H2+, and H3+ Ions

By:
Harris, Peter R; Meyer, Fred W; Jacob, W.; Schwarz-Selinger, T.; Von Toussaint, U.
Journal Name:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Page Number:
1276-1279
Volume:
269
Issue Number:
11
Publication Date:
May 31, 2011
Conference Name:
18th International Workshop on Inelastic Ion-Surface Collisions (IISC-18)
Conference Location:
Gatlinburg, Tennessee, United States of America
View DOI Listing:
https://doi.org/10.1016/j.nimb.2010.12.071