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Publication

Nano-Scale Analysis of Precipitates in Nitrogen-Doped Czochralski SIlicon...

by G. Rozgonyi, A. Karoui, A. Kvit, Gerd J Duscher

Publication Type

Journal

Journal Name

Microelectronics Engineering

Publication Date

June, 2003

Page Numbers

305 to 313

Volume

66

Issue

2