February 2006

Conference Paper

Transmission Electron Microscopy: Overview and Challenges

By:
Pennycook, Stephen J; Lupini, Andrew R; Borisevich, Albina Y; Varela Del Arco, Maria ; Peng, Yiping ; Nellist, Peter; Duscher, Gerd J; Buczko, R.; Pantelides, Sokrates T
Page Number:
627-633
Volume:
683
Book Title:
Characterization and Metrology for ULSI Technology
Publication Date:
February 2006
Conference Name:
Characterization and Metrology for ULSI Technology: 2003 International Conference
Conference Location:
Austin, Texas, United States of America