Resolution of the Electron Microscope at the Atomic Scale

Abstract

The importance of atomic-resolution electron microscopy as a tool for structure analysis lies in its ability to produce images in which each peak corresponds to the position of an atom (or atomic column) within the specimen. Being able to distinguish between atoms (or columns) that appear close together when projected in the chosen viewing direction depends on the resolution of the microscope. Knowledge of the resolution of any particular electron microscope is crucial to judge if its resolution is appropriate for the specimen. In addition, resolution quality will determine the precision of measured atom positions.