July 2003

Journal

Profile Coatings and their Applications

By:
Liu, Chian; Conley, R.; Assoufid, Lahsen; Macrander, Albert; Ice, Gene E; Tischler, Jonathan Z; Zhang, K.
Journal Name:
Journal of Vacuum Science & Technology A
Page Number:
1579-1584
Volume:
21
Issue Number:
4
Publication Date:
July 2003