February 2006

Journal

Nitridation anisotropy in SiO2/4H-SiC

By:
Dhar, S.; Feldman, Leonard; Chang, K.-C.; Cao, Y.; Porter, L.M.; Bentley, James ; Williams, J.
Journal Name:
Journal of Applied Physics
Page Number:
074902
Volume:
97
Issue Number:
07
Publication Date:
February 2006