Tunable 3D Nanoresonators for Gas-Sensing Applications

Tunable 3D Nanoresonators for Gas-Sensing Applications

Scientific Achievement
A tilted scanning electron microscope image of a composite sensing element attached to microscopic electrodes. The apex of the sensor oscillates over 2 micrometers during resonance excitation in preparation for sensing. (hi-res image)

Tuning the mechanical properties of a 3D nanoprinted composite enabled gas selective sensing

Significance and Impact

3D nanoprinting using a focused electron beam makes it possible to deposit sensing elements directly on planar/non-planar microelectronic devices

Research Details

– 3D nanoprinting via an electron beam was used to deposit a metal (Pt) –matrix (C) composite nanowire

– Additional electron beam curing made it possible to mechanically strengthen the composite enabling gas detection using resonance sensing

– The resonance frequency of the nanowire was sensitive to both physical and chemical bonding

G. Arnold, R. Winkler, M. Stermitz, A. Orthacker, J-H. Noh, J. D. Fowlkes, G. Kothleitner, M. Huth, P. D. Rack, and H. Plank, "Tunable 3D Nanoresonators for Gas-Sensing Applications,"  Advanced Functional Materials (2018). DOI: 10.1002/adfm.201707387


CNMS Researchers