Hitachi NB-5000 FIB-SEM

• FEG scanning electron microscope with STEM detector
• High-milling-rate Ga ion column
• W or C deposition
• Hitachi nanomanipulator for specimen lift-out
• Automated 3D imaging
• Integrated EDAX Pegasus SDD-EDS and OIM-EBSD

Current Research Activities

• TEM specimen preparation
• 3D reconstruction of microstructural features
• Collaborations for new technique development are welcome

Contact:

C. M. Parish, parishcm@ornl.gov
(865) 574-0092