FEI Nova 200 Dual-Beam SEM/FIB
Techniques/Capabilities
- FEG scanning electron microscope
- Ion column with Ga liquid ion source for milling
- GIS for Pt deposition
- Kleindiek nanomanipulator for specimen lift-out
- Oxford Inca EDS system
- AutoTEM, AutoFIB, and slice and view automation software
Current Research Activities
- Support instrument for atom probe and TEM specimen preparation
- 3D reconstruction of microstructural features
Contact:
M. K. Miller, millermk@ornl.gov(865) 574-4719