These are the best choice for applications requiring current densities in excess of about 50 µA/cm2. The LiCoO2 films up to 4µm thick are deposited by rf magnetron sputtering of LiCoO2 and then annealed at 700°C for 2 hours. As illustrated in the figures below, better than 50% of the cathode is utilized at continuous discharge rates of more than 3 mA/cm2. For most cells, the resistance is dominated by the Lipon electrolyte.
Some other features of Li-LiCoO2 thin film batteries: