Thin-Film Battery Fabrication Steps

Discharge curves at different temperatures for a Li-LiCoO₂ battery with a 1 cm² x 0.8 µm cathode.

Deposition Sequence:

1. Current collectors: dc magnetron sputtering

2. Cathode: rf magnetron sputtering or e-beam evaporation

3. (Optional) high temperature anneal to crystallize cathode

4. Lipon electrolyte: rf magnetron sputtering of Li₃PO₄

5a. Lithium anode: evaporation of Li metal. (red path)

5b. Li-ion anode: rf or dc magnetron sputtering of SnO₂-SiO₂, Sn, Zn or In. (yellow path)

5c. "Li-free" anode: dc magnetron sputtering of current collector. (green path)

6. Multilayer protective coating: rf magnetron sputtering of Li₃PO₄ or parylene + Ti deposition