FEI Nova 200 Dual-Beam SEM/FIB

This instrument can be downloaded and is provided here in Adobe PDF formats.

Techniques/Capabilities:

• FEG scanning electron microscope
• Ion column with Ga liquid ion source for milling
• GIS for Pt deposition
• Kliendiek nanomanipulator for specimen lift-out
• AutoTEM, AutoFIB, and slice and view automation software

Current Research Activities:

• Support instrument for atom probe and TEM specimen preparation
• Support instrument for nanoindentor and micropillar preparation
• 3D reconstruction of microstructural features

Contact: M.K. Miller, (865) 574-4719