Hitachi FB-2000A Focused Ion Beam (FIB) System

This instrument can be downloaded and is provided here in Adobe PDF formats.

Techniques/Capabilities:

• W-deposition/liquid Ga ion source
• Micromachining/Patterning
• Site-specific lift-out of specimens for
  TEM preparation

Current Research Activities:

• Oxide Scales on Metallic Alloys
• Coated Ceramic Fibers
• Superconductors/Buffer Layers
• Thermal Barrier Coatings

Contact: Dorothy Coffey, coffeydw@ornl.gov, (865) 576-7688