User Information


Requirements

In order to become an authorized user of the NSTL clean room facility, you must:

  • Complete all required safety training modules.
  • Complete the clean room-specific safety training module which includes a walk-through of the facility with a staff member.
  • Request badge reader access to the facility.


Safety Training Modules

Anyone wishing to become a user of the NSTL facility is required to complete the following series of safety training modules as mandated by the current safety policy on the campus of the Oak Ridge National Laboratory. The required training modules include:

90136  ORNL HAZCOM Level I

91828  ORNL Chemical Hygiene Plan

18614  Waste Certification Program

90438  Liquid Waste Generator Program

93587  Waste Generator Awareness Training

21658  ORR Waste Certification

These are all web-based training modules accessible from your desktop computer. All users must complete this training prior to establishing access to the clean room facility. There will be no exceptions.

Clean Room Module

In addition to the safety training modules, there is a clean room specific training module which must also be completed:

92192  Laboratory Usage and Safety Manual for NSTLC

This training requirement includes a web-based module and a walk-through of the facility detailing specific hazards and safety procedures within the clean room.

Upon completion of the web-based module, please contact Boyd Evans @ 574-9418 or evansbmiii@ornl.gov in order to schedule your walk-through session.

Clean Room Facility User Manual 166k


Clean Room Access


At the completion of all training, please contact Kathy Martin @ 576-4837 or martinkj1@ornl.gov to have the clean room facility's badge reader programmed. A charge number must be provided from which usage fees (detailed below) will be deducted.
GCA AutoStep 200
YES Image Reversal Oven
YES Vacuum Bake/Vapor Prime
Karl Suss Contact Aligner
Sink, Lift-off Station, Ultrasonic Cleaner
Spinner and Developing Station
Trion Technologies Oracle
Trion Technologies Orion
Strasbaugh 6EC CMP
Disco Dad Dicing Saw
Signatone Probe Station
K & S Wire Bonders
Electron Gun PVD

DC Sputtering System
 

Usage Fees

The charge for using the clean room can be obtained by calling Kathy Martin. This rate covers the cost of using any piece of equipment inside the clean room except for the GCA AutoStep 200 i-line stepper. An additional hourly charge (plus the hourly clean room rate) is assessed to users of this tool.

If you have any questions or would like more information on becoming a user of the NSTL clean room facility, you may contact:

Boyd Evans evansbmiii@ornl.gov or 574-9418

Kathy Martin martinkj1@ornl.gov or 576-4837

Gary Alley alleygt@ornl.gov or 574-5725

 

Oak Ridge National Laboratory UT-Battelle