Name - Curriculum Vita

Curriculum Vita

Dr. Philip R. Bingham
	P.O. Box 2008, Oak Ridge National Lab, Oak Ridge ,TN 37831-6075 Wk: (865) 574-5680, Fax: (865) 576-8993 E-mail: binghampr@ornl.gov

Experience

Dr. Bingham is a research engineer in the Image Science & Machine Vision Group at the Oak Ridge National Laboratory. In the four years he has been working at ORNL, he has been involved with several aspects of image processing that center around industrial inspection. During this time, has helped developing and integrating image processing and control software and hardware for the development of a prototype wafer inspection system using the Direct to Digital Holography (DDH) technology developed at ORNL. He has served as a technical lead for the DDH work performed for nLine Corporation and has been involved in further developing DDH for other applications. These further developments include application of DDH to photolithographic mask inspection and metrology as well as extending the measurement range of DDH using two wavelengths. Previous to joining ORNL, he attended Georgia Tech and worked as a research assistant in the Computer Engineering Research Laboratory (CERL). In that role, he was involved in both the software and hardware development of custom computing systems ranging from parallel computing systems to custom ASICs. He is interested in the combination of image processing techniques with data from sensor systems to improve the quality of information obtained by the sensor. Additionally, he is interested in ability for image processing to enable the development of new sensors.

Education

Ph.D.	Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia, 1999. Dissertation: The Effect of Message Length Distribution on the Performance of Fully Connected Switches.
M.S.	Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia, 1991.
B.S.	Electrical and Computer Engineering, University of Tennessee, Knoxville, Tennessee, 1989.

Issued and Pending Patents

Price, J.R, and Bingham, P.R., “Rapid Acquisition Fused Off-Axis Illumination Direct-to-Digital Holography”, ORNL ID No. 0967, August 2002, (Patent pending).

Hanson, G.R., Bingham, P.R., Simpson, R.T., Voelkle, E., and Karnowski, T.P.,”Technique for Optaining Two-Wavelength Differential-Phase Direct-to-Digital Heterodyned Holograms”, ORNL ID No. 0933, April, 2003, (Patent pending).

Hanson, G.R., and Bingham, P.R., “Recording Multiple Spatially-Heterodyned Direct to Digital Holograms in One Digital Image”, ORNL ID No. 0933.1, June 2003, (Patent pending).

Hanson, G.R. and Bingham, P.R., “Faster Processing of Multiple Spatially-Heterodyned Direct to Digital Holograms”, ORNL ID No. 0933.2, June 2003, (Patent pending).

Hanson, G.R., Bingham, P.R., Tobin, K.W., “High-Speed Transmission and Reflection Measurements using Spatial-Heterodyne Interferometry for Complete Inspection/Metrology of Translucent Objects”, UT-Battelle, LLC, Invention Disclosure No. 1225, S-101,813, November 2002.

Bingham, P.R., Hanson, G.R., Tobin, K.W., “A System for High-Speed Transmissive Spatial-Heterodyne Interferometric Measurements”, UT-Battelle, LLC, Invention Disclosure No. 1224, S-101,812, November 2002.

Recent Awards

Oak Ridge National Laboratory Awards Night Finalist for Inventor of the Year Award for work in extending the Direct to Digital Holography portfolio, November 2003.

National Federal Laboratory Consortium Award for Excellence in Technology Transfer, "Direct-to-Digital Holography for High-Speed, High Resolution Defect Inspection", March 2002.

Oak Ridge National Laboratory Awards Night Recognition for Engineering Development by a Team for developing a first of a kind direct to digital holographic prototype wafer defect detection system, November 2001.

Oak Ridge National Laboratory Significant Event Award for development and implementation of image processing and control algorithms and software for the prototype direct to digital holographic wafer defect detection system, 2001.

Selected Publications

P.R. Bingham, J.R. Price, K.W. Tobin, and T.P. Karnowski, “Semiconductor sidewall shape estimation,” To appear in the SPIE Journal of Electronic Imaging, July 2004.

P.R. Bingham, K.W. Tobin, M.H. Bennett, and P. Marmillion, “Phase defect detection with spatial heterodyne interferometry,” SPIE 29 th Annual International Symposium on Microlithography, February 2004.

P.R. Bingham, K.W. Tobin, M.H. Bennett, and P. Marmillion, “Preliminary results for mask metrology using spatial heterodyne interferometry,” 23 rd annual BACUS Symposium on Photomask Technology, SPIE, Vol. 5256, pp. 1331-42, 2003.

J.R. Price, P.R. Bingham, K.W.Tobin, and T.P. Karnowski, “Semiconductor Sidewall Estimation Using Top-Down Image Retrieval,” Sixth International Conference on Quality Control by Artificial Vision, SPIE, Vol. 5132, p. 209-219, May 2003.

J.R. Price, K.W. Hylton, K.W. Tobin, P.R. Bingham, J.D. Hunn, and J.R. Haines, “ Detection of Cavitiation Pits on Steel Surfaces Using SEM Imagery,” Sixth International Conference on Quality Control by Artificial Vision, SPIE, Vol. 5132, p. 476-484, May 2003.

C. E. Thomas Jr., M. A. Hunt, T. M. Bahm, L. R. Baylor, P. R. Bingham, M. D. Chidley, X. Dai, A. El-Khashab, J. M. Gilbert, J. S. Goddard, G. R. Hanson, J. D. Hickson, K. W. Hylton, G. C. John, M. L. Jones, M. W. Mayo, C. Marek, J. H. Price, D. A. Rasmussen, L. J. Schaefer, M. A. Schulze, B. Shen, R. G. Smith, A. N. Su, K. W. Tobin, W. R. Usry, E. Voelkl, K. S. Weber. "Direct to digital holography for high aspect ratio inspection of semiconductor wafers." Presented at the 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, March 2003.

J.R. Price, P.R. Bingham, K.W.Tobin, and T.P. Karnowski, “Estimating Cross-Section Semiconductor Structure by Comparint Top-Down SEM Images,” Machine Vision Applications in Industrial Inspection XI, Proce. SPIE, Vol. 5011, March 2003.

P.R. Bingham, J.R. Price, K.W. Tobin, T.P. Karnowski, M.H. Bennett, H. Bogardus, and M. Bishop, “Sidewall Structure Estimation from CD-SEM for Lithographic Process Control,” Process and Materials Characterization and Diagnostics in IC Manufacturing II, SPIE, February 2003.

C. E. Thomas Jr., T. M. Bahm, L. R. Baylor, P. R. Bingham, S. W. Burns, M. D. Chidley, X. Dai, R. J. Delahanty, C. J. Doti, A. El-Khashab, R. L. Fisher, J. M. Gilbert, J. S. Goddard, G. R. Hanson, J. D. Hickson, M. A. Hunt, K. W. Hylton, G. C. John, M. L. Jones, K. R. MacDonald, M. W. Mayo, I. MacMackin, D. R. Patek, J. H. Price, D. A. Rasmussen, L. J. Schaefer, T. R. Scheidt, M. A. Schulze, P. D. Schumaker, B. Shen, R. G. Smith, A. N. Su, K. W. Tobin, W. R. Usry, E. Voelkl, K. S. Weber, P. G. Jones, and R. W. Owen. "Direct to digital holography for semiconductor wafer defect detection and review." Design, Process Integration, and Characterization for Microelectronics, Proc. SPIE v. 4692, pp. 180-194, March 2002.

R.W. Melton, C.O. Alford, P.R. Bingham, and T.C. Huang, “Relating Empirical Performance Data to Achievable Parallel Application Performance,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications (PDPTA ’99), Vol. III, pp. 1627-1633, July, 1999.

T.C. Huang, S. Yalamanchili, R.W. Melton, P.R. Bingham, and C.O. Alford, “Teaching Pipelining and Concurrency Using Hardware Description Languages,” Proceedings 1999 IEEE International Conference on Microelectronic Systems Education (MSE ’99), pp. 55-56, July 1999.

T.C. Huang, R.W. Melton, P.R. Bingham, L. Wills, and C.O. Alford, “Active-Passive Deterministic Parallel System Specification Using Z,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications (PDPTA ’99), Vol. IV, pp. 2027-2033, July 1999.

P.R. Bingham, C.O. Alford, R.W. Melton, and T.C. Huang, “Parallel Application Optimization via Network Models,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, Vol. IV, pp. 2252-2258, July 1999.

T.C. Huang, R.W. Melton, C.O. Alford, and P.R. Bingham, “TCP/UDP/IP Protocol Processing with a RISC Instruction Set,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, pp. 645-652, July 1998.

P.R. Bingham, C.O. Alford, R.W. Melton, and T.C. Huang, “Bandwidth of Fully Connected Switches Transferring Continuous Messages,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, pp. 1859-1862, July 1998.

T.C. Huang, R.W. Melton, P.R. Bingham, C.O. Alford, and F. Ghannadian, “The Teaching of VHDL in Computer Architecture,” 1997 IEEE International Conference on Microelectronic Systems Education (MSE ’97), pp. 133-134, July 1997. R.W. Melton, P.R. Bingham, C.O. Alford, and M.B. Woods, “A Transputer-Based Scalable, Parallel Global Climate Change Model,” Transputer Research and Applications Conference 7 (NATUG 7), pp. 60-67, October 1994.


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