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P.R. Bingham, J.R. Price, K.W. Tobin, and T.P. Karnowski, “Semiconductor sidewall shape estimation,” To appear in the SPIE Journal of Electronic Imaging, July 2004.
P.R. Bingham, K.W. Tobin, M.H. Bennett, and P. Marmillion, “Phase defect detection with spatial heterodyne interferometry,” SPIE 29 th Annual International Symposium on Microlithography, February 2004.
P.R. Bingham, K.W. Tobin, M.H. Bennett, and P. Marmillion, “Preliminary results for mask metrology using spatial heterodyne interferometry,” 23 rd annual BACUS Symposium on Photomask Technology, SPIE, Vol. 5256, pp. 1331-42, 2003.
J.R. Price, P.R. Bingham, K.W.Tobin, and T.P. Karnowski, “Semiconductor Sidewall Estimation Using Top-Down Image Retrieval,” Sixth International Conference on Quality Control by Artificial Vision, SPIE, Vol. 5132, p. 209-219, May 2003.
J.R. Price, K.W. Hylton, K.W. Tobin, P.R. Bingham, J.D. Hunn, and J.R. Haines, “ Detection of Cavitiation Pits on Steel Surfaces Using SEM Imagery,” Sixth International Conference on Quality Control by Artificial Vision, SPIE, Vol. 5132, p. 476-484, May 2003.
C. E. Thomas Jr., M. A. Hunt, T. M. Bahm, L. R. Baylor, P. R. Bingham, M. D. Chidley, X. Dai, A. El-Khashab, J. M. Gilbert, J. S. Goddard, G. R. Hanson, J. D. Hickson, K. W. Hylton, G. C. John, M. L. Jones, M. W. Mayo, C. Marek, J. H. Price, D. A. Rasmussen, L. J. Schaefer, M. A. Schulze, B. Shen, R. G. Smith, A. N. Su, K. W. Tobin, W. R. Usry, E. Voelkl, K. S. Weber. "Direct to digital holography for high aspect ratio inspection of semiconductor wafers." Presented at the 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, March 2003.
J.R. Price, P.R. Bingham, K.W.Tobin, and T.P. Karnowski, “Estimating Cross-Section Semiconductor Structure by Comparint Top-Down SEM Images,” Machine Vision Applications in Industrial Inspection XI, Proce. SPIE, Vol. 5011, March 2003.
P.R. Bingham, J.R. Price, K.W. Tobin, T.P. Karnowski, M.H. Bennett, H. Bogardus, and M. Bishop, “Sidewall Structure Estimation from CD-SEM for Lithographic Process Control,” Process and Materials Characterization and Diagnostics in IC Manufacturing II, SPIE, February 2003.
C. E. Thomas Jr., T. M. Bahm, L. R. Baylor, P. R. Bingham, S. W. Burns, M. D. Chidley, X. Dai, R. J. Delahanty, C. J. Doti, A. El-Khashab, R. L. Fisher, J. M. Gilbert, J. S. Goddard, G. R. Hanson, J. D. Hickson, M. A. Hunt, K. W. Hylton, G. C. John, M. L. Jones, K. R. MacDonald, M. W. Mayo, I. MacMackin, D. R. Patek, J. H. Price, D. A. Rasmussen, L. J. Schaefer, T. R. Scheidt, M. A. Schulze, P. D. Schumaker, B. Shen, R. G. Smith, A. N. Su, K. W. Tobin, W. R. Usry, E. Voelkl, K. S. Weber, P. G. Jones, and R. W. Owen. "Direct to digital holography for semiconductor wafer defect detection and review." Design, Process Integration, and Characterization for Microelectronics, Proc. SPIE v. 4692, pp. 180-194, March 2002.
R.W. Melton, C.O. Alford, P.R. Bingham, and T.C. Huang, “Relating Empirical Performance Data to Achievable Parallel Application Performance,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications (PDPTA ’99), Vol. III, pp. 1627-1633, July, 1999.
T.C. Huang, S. Yalamanchili, R.W. Melton, P.R. Bingham, and C.O. Alford, “Teaching Pipelining and Concurrency Using Hardware Description Languages,” Proceedings 1999 IEEE International Conference on Microelectronic Systems Education (MSE ’99), pp. 55-56, July 1999.
T.C. Huang, R.W. Melton, P.R. Bingham, L. Wills, and C.O. Alford, “Active-Passive Deterministic Parallel System Specification Using Z,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications (PDPTA ’99), Vol. IV, pp. 2027-2033, July 1999.
P.R. Bingham, C.O. Alford, R.W. Melton, and T.C. Huang, “Parallel Application Optimization via Network Models,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, Vol. IV, pp. 2252-2258, July 1999.
T.C. Huang, R.W. Melton, C.O. Alford, and P.R. Bingham, “TCP/UDP/IP Protocol Processing with a RISC Instruction Set,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, pp. 645-652, July 1998.
P.R. Bingham, C.O. Alford, R.W. Melton, and T.C. Huang, “Bandwidth of Fully Connected Switches Transferring Continuous Messages,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, pp. 1859-1862, July 1998.
T.C. Huang, R.W. Melton, P.R. Bingham, C.O. Alford, and F. Ghannadian, “The Teaching of VHDL in Computer Architecture,” 1997 IEEE International Conference on Microelectronic Systems Education (MSE ’97), pp. 133-134, July 1997. R.W. Melton, P.R. Bingham, C.O. Alford, and M.B. Woods, “A Transputer-Based Scalable, Parallel Global Climate Change Model,” Transputer Research and Applications Conference 7 (NATUG 7), pp. 60-67, October 1994.
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