P.O. Box 2008, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6075
Wk: (865) 574-5680, Fax: (865) 576-8993
E-mail: binghampr@ornl.gov

Dr. Philip Bingham is a research engineer in the Image Science and Machine Vision (ISMV) Group at the Oak Ridge NationalLaboratory. Since he joined ISMV in 1999, he has been involved with several aspects of image processing that center around industrial inspection. During this time, has helped developing and integrating image processing and control software and hardware for the development of a prototype wafer inspection system using the Direct to Digital Holography (DDH) technology developed at ORNL. He has served as a technical lead for the DDH work performed for nLine Corporation and has been involved in further developing DDH for other applications. These further developments include application of DDH to photolithographic mask inspection and metrology as well as extending the measurement range of DDH using two wavelengths. Previous to joining ORNL, he attended Georgia Tech and worked as a research assistant in the Computer Engineering Research Laboratory (CERL). In that role, he was involved in both the software and hardware development of custom computing systems ranging from parallel computing systems to custom ASICs. He is interested in the combination of image processing techniques with data from sensor systems to improve the quality of information obtained by the sensor. Additionally, he is interested in ability for image processing to enable the development of new sensors.

Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia, 1999.
Dissertation: The Effect of Message Length Distribution on the Performance of Fully Connected Switches.

Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia, 1991.

Bingham, P. R., Price, J. R., Tobin, K. W. and Karnowski, T. P., “Semiconductor Sidewall Shape Estimation,” Journal of Electronic Imaging 13, 474 (2004).

Bingham, P. R., Tobin, K. W., Bennett, M. H., and Marmillion, P., “Phase Defect Detection with Spatial Heterodyne Interferometry,” SPIE 29 th Annual International Symposium on Microlithography, February 2004.

Bingham, P. R., Tobin, K. W., Bennett, M. H., and Marmillion, P., “Preliminary Results for Mask Metrology Using Spatial Heterodyne Interferometry,” 23rd annual BACUS Symposium on Photomask Technology, SPIE, Vol. 5256, pp. 1331-42, 2003.

Price, J. R., Bingham, P. R., Tobin, K. W., and Karnowski, T. P.,“Semiconductor Sidewall Estimation Using Top-Down Image Retrieval,” Sixth International Conference on Quality Control by Artificial Vision, SPIE, Vol. 5132, p. 209-219, May 2003.

Price, J. R., Hylton, K. W., Tobin, K. W., Bingham, P. R., Hunn, J. D., and Haines, J. R., “Detection of Cavitiation Pits on Steel Surfaces Using SEM Imagery,” Sixth International Conference on Quality Control by Artificial Vision, SPIE, Vol. 5132, p. 476-484, May 2003.

Thomas, Jr., C. E., Hunt, M. A., Bahm, T. M., Baylor, L. R., Bingham, P. R., Chidley, M. D., Dai, X.,  El-Khashab, A., Gilbert, J. M., Goddard, J. S., Hanson, G. R. , Hickson, J. D., Hylton, K. W., John, G. C., Jones, M. L., Mayo, M. W., Marek, C., Price, J. H., Rasmussen, D. A., Schaefer, L  J., Schulze, M. A., Shen, B., Smith, R. G., Su, A. N., Tobin, K. W., Usry, W. R., Voelkl, E., and Weber, K. S., “Direct to Digital Holography for High Aspect Ratio Inspection of Semiconductor Wafers,” Presented at the 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, March 2003.

Price, J. R., Bingham, P. R., Tobin, K. W., and Karnowski, T. P., “Estimating Cross-Section Semiconductor Structure by Comparint Top-Down SEM Images,” Machine Vision Applications in Industrial Inspection XI, Proceedings of SPIE, Vol. 5011, March 2003.

Bingham, P. R., Price, J. R., Tobin, K. W., Karnowski, T. P., Bennett, M. H., Bogardus, H., and Bishop, M., “Sidewall Structure Estimation from CD-SEM for Lithographic Process Control,” Process and Materials Characterization and Diagnostics in IC Manufacturing II, SPIE, February 2003.

Thomas, Jr., C. E., Bahm, T. M., Baylor, L. R., Bingham, P. R., Burns, S. W., Chidley, M. D., Dai, X., Delahanty, R. J., Doti, C. J., El-Khashab, A., Fisher, R. L., Gilbert, J. M., Goddard, J. S., Hanson, G. R., Hickson, J. D., Hunt, M. A., Hylton, K. W., John, G. C., Jones, M. L., MacDonald, K. R., Mayo, M. W., MacMackin, I., Patek, D. R., Price, J. H., Rasmussen, D. A., Schaefer, L. J., Scheidt, T. R., Schulze, M. A., Schumaker, P. D., Shen, B., Smith, R. G., Su, A. N., Tobin, K. W., Usry, W. R., Voelkl, E., Weber, K. S., Jones, P. G., and Owen, R. W., “Direct to Digital Holography for Semiconductor Wafer Defect Detection and Review,” Proceedings of the Design, Process Integration, and Characterization for Microelectronics, SPIE Vol. 4692, pp. 180-194, March 2002.

Melton, R. W., Alford, C. O., Bingham, P. R., and Huang, T. C., “Relating Empirical Performance Data to Achievable Parallel Application Performance,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications (PDPTA ’99), Vol. III, pp. 1627-1633, July, 1999.

Huang, T. C., Yalamanchili, S., Melton, R. W., Bingham, P. R., and Alford, C. O., “Teaching Pipelining and Concurrency Using Hardware Description Languages,” Proceedings 1999 IEEE International Conference on Microelectronic Systems Education (MSE ’99), pp. 55-56, July 1999.

Huang, T. C., Melton, R. W., Bingham, P. R., Wills, L., and Alford, C. O., “Active-Passive Deterministic Parallel System Specification Using Z,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications (PDPTA ’99), Vol. IV, pp. 2027-2033, July 1999.

Bingham, P. R., Alford, C. O., Melton, R. W., and Huang, T. C., “Parallel Application Optimization via Network Models,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, Vol. IV, pp. 2252-2258, July 1999.

Huang, T. C., Melton, R. W., Alford, C. O., and Bingham, P. R., “TCP/UDP/IP Protocol Processing with a RISC Instruction Set,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, pp. 645-652, July 1998.

Bingham, P. R., Alford, C. O., Melton, R. W., and Huang, T. C., “Bandwidth of Fully Connected Switches Transferring Continuous Messages,” Proceedings of the International Conference on Parallel and Distributed Processing Techniques and Applications, pp. 1859-1862, July 1998.

Huang, T.C., Melton, R.W., Bingham, P.R., Alford, C.O., and Ghannadian, F., “The Teaching of VHDL in Computer Architecture,” 1997 IEEE International Conference on Microelectronic Systems Education (MSE ’97), pp. 133-134, July 1997. R.W. Melton, P.R. Bingham, C.O. Alford, and M.B. Woods, “A Transputer-Based Scalable, Parallel Global Climate Change Model,” Transputer Research and Applications Conference 7 (NATUG 7), pp. 60-67, October 1994.