Research & Development

Industrial Inspection Research Projects

• Automatic Defect Classification for Semiconductor Wafer Inspection and Review
   
• Automatic Image Retrieval and Data Management for Semiconductor Defect Databases
   
• Digital Holographic Microscopy for Industrial Inspection and Metrology
   
• Spatial Signature Analysis for Sourcing the Cause of Semiconductor Wafer Defects
   
• Image-Based Metrology