ORNL/Sematech
RF Power
Benchmark Facility
Benchmarking: Model & evaluate RF tools
Measure circuit parameters
Modeling: inferred voltages, losses, etc
Make current & voltage probes, as appropriate
Evaluate stability
Full power tests
Suggest improvements
Evaluate methods to make tools reliably manufacturable
Oak Ridge Centers for Manufacturing Technology / 1-800-356-4USA / 4USA@ornl.gov
Last revised: 4-May-1997.