37th IUVSTA Workshop on Plasma Deposition
of Advanced Materials
September 14-18, 2003
Kerkrade,
The Netherlands
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At left is the Rolduc Conference Centre a modern conference centre/hotel in a centuries-old setting
|
Sponsored by the Plasma Science and Technique
Division, Electronics Materials and Processing Division, and
the Thin Film Division of the
International
Union of Vacuum Science, Technique, and Applications
(IUVSTA)
The main focus of the workshop will be on the role of the plasma in the deposition of advanced materials, such as optical materials, polymers, wide band gap semiconductors, diamond, electronic materials and carbon nanotubes.
Topics include:
Invited Speakers
Include: A. von Keudell (Growth
Mechanisms) W.M.M. Kessels (Growth
Mechanisms) D. Mataras (Nanostructured
Silicon Thin Films) M. Meyyappan (Carbon Nanotube
Deposition) W.I. Milne (Carbon Nanotube
Deposition) E. Fisher (Polymer
Deposition) A. Ohl (Microstructured
Bio-materials) A. Milella (Nanostructured
Teflon-Like Materials) M. Shiratani (Copper
PECVD) A. Grill (Low-K Material
PECVD) J.Vleck (Diagnostics During
Copper Depsition)
Workshop Program:
The Workshop Program is now available. An LCD projector will be available for the oral sessions. For the poster session, the board size is 2.1 meters by 1.0 meter.
Workshop
Style: The workshop will be run in a
Gordon-Conference style with sessions in the
mornings and evenings. The afternoons will be open
to encourage free discussions. Abstract Submission and
Registration Abstract
Submission Instructions The abstract submission and
registration deadline is Friday, July 11, 2003.
Please contact John Caughman (caughmanjb@ornl.gov)
for further details concerning abstract submission
and registration. Registration and
Accommodation Fee Registration
Form(pdf) or
Registration
Form(word) The Registration fee for the
workshop is 400 Euros ( 450 Euros after July 11)
and includes all accommodations for one person from
Sunday night, September 14, through Thursday,
September 18. Meals are included from breakfast on
Monday, September 15, through breakfast on
Thursday, September 18.
