RF Benchmarking & Evaluation Facility

RF Benchmarking detaills faraday shield measurements

The RF Benchmarking Facility provides detailed low and high power characterization and calibration of RF sensors, transmission lines, matching networks, and generators using an array of diagnostic equipment including network analyzers, vector spectrum analyzers, RF calorimeter, IR camera and data acquisition equipment. A variety of surrogate loads to simulate a plasma are available, as well as actual plasma loads for some applications.

Photo of experimental configuration using a variable spark gap to measure the response of the RF power delivery system to an arc while operating a full process power. The planar coil shown is used to generate and sustain process plasmas used in the semiconductor industry.

Plot of energy in the magnetic field (B2) showing the plasma power deposition pattern taken using a magnetic field probe on a computer controlled probe positioning system.

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